WaferLot nTot nOK nB2 nC1 nC2 yield yieldOpt 28 5432 4121 1187 124 0 75.9% 78.1% 29 6512 5303 935 274 0 81.4% 85.6% [yield=nOK/nTot yieldOpt=(nTot-nB2)/nTot]