WaferLot nTot nOK nB2 nC1 nC2 yield yieldOpt 28 5432 3785 1294 353 0 69.7% 76.2% 29 6512 4506 1288 718 0 69.2% 80.2% [yield=nOK/nTot yieldOpt=(nTot-nB2)/nTot]